Tungsten work function engineering for dual metal gate nano-CMOS
- J. K. Efavi
- , T. Mollenhauer
- , T. Wahlbrink
- , H. D.B. Gottlob
- , M. C. Lemme
- , H. Kurz
- AMO GmbH
Research output: Contribution to journal › Article › peer-review
16
Citations
(Scopus)