Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films

Onwona Agyeman; Chao Nan Xu; Wensheng Shi; Xu Guan Zheng; Morio Suzuki

doi:10.1143/jjap.41.666

Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films

Onwona Agyeman
, Chao Nan Xu
, Wensheng Shi
, Xu Guan Zheng
, Morio Suzuki

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5% H₂ diluted in Ar), oxygen and argon ambient, up to 1100°C. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.

Original language	English
Pages (from-to)	666-669
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	2 A
DOIs	https://doi.org/10.1143/jjap.41.666
Publication status	Published - Feb 2002
Externally published	Yes

Keywords

Annealing
Crystallinity
Photoluminescence
Thin film
Ultraviolet
ZnO

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10.1143/jjap.41.666

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title = "Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films",

abstract = "Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5\% H2 diluted in Ar), oxygen and argon ambient, up to 1100°C. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.",

keywords = "Annealing, Crystallinity, Photoluminescence, Thin film, Ultraviolet, ZnO",

author = "Onwona Agyeman and Xu, \{Chao Nan\} and Wensheng Shi and Zheng, \{Xu Guan\} and Morio Suzuki",

year = "2002",

month = feb,

doi = "10.1143/jjap.41.666",

language = "English",

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pages = "666--669",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

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T1 - Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films

AU - Agyeman, Onwona

AU - Xu, Chao Nan

AU - Shi, Wensheng

AU - Zheng, Xu Guan

AU - Suzuki, Morio

PY - 2002/2

Y1 - 2002/2

N2 - Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5% H2 diluted in Ar), oxygen and argon ambient, up to 1100°C. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.

AB - Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5% H2 diluted in Ar), oxygen and argon ambient, up to 1100°C. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.

KW - Annealing

KW - Crystallinity

KW - Photoluminescence

KW - Thin film

KW - Ultraviolet

KW - ZnO

UR - https://www.scopus.com/pages/publications/0036478642

U2 - 10.1143/jjap.41.666

DO - 10.1143/jjap.41.666

M3 - Article

AN - SCOPUS:0036478642

SN - 0021-4922

VL - 41

SP - 666

EP - 669

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 2 A

ER -

Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films

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Keywords

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