Relationship between the photoluminescence property and the crystallinity of ZnO thin films

Onwona Agyeman, Chao Nan Xu, Hiroshi Tateyama, Morio Suzuki, Xu Guang Zheng

Research output: Contribution to journalConference articlepeer-review

Abstract

Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed in various conditions such as in vacuum, reducing gas (5 % H2 diluted in Ar), oxygen and argon ambient, up to 1100 °C. We have observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deeplevel emission peaks. We have found that the UV / visible emission ratio increased with the increase of the crystallinity of the ZnO films.

Original languageEnglish
Pages (from-to)107-112
Number of pages6
JournalKey Engineering Materials
Volume228-229
Publication statusPublished - 2002
Externally publishedYes
EventAsian Ceramic Science for Electronics II Proceedings of the 2nd Asian Meeting of Electroceramics - Kawasaki
Duration: 1 Oct 20011 Oct 2001

Keywords

  • Annealing Effect
  • Crystallinity
  • Photoluminescence
  • Sputtering
  • ZnO

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