Nickel-silicide process for ultra-thin-body SOI-MOSFETs
- M. Schmidt
- , T. Mollenhauer
- , H. D.B. Gottlob
- , T. Wahlbrink
- , J. K. Efavi
- , L. Ottaviano
- , S. Cristoloveanu
- , M. C. Lemme
- , H. Kurz
- AMO GmbH
- National Research Council of Italy
- IMEP-ENSERG
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)