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Nickel-silicide process for ultra-thin-body SOI-MOSFETs
M. Schmidt, T. Mollenhauer, H. D.B. Gottlob, T. Wahlbrink, J. K. Efavi, L. Ottaviano, S. Cristoloveanu, M. C. Lemme, H. Kurz
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)