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Highly selective etch process for silicon-on-insulator nano-devices
T. Wahlbrink, T. Mollenhauer, Y. M. Georgiev, W. Henschel, J. K. Efavi, H. D.B. Gottlob, M. C. Lemme, H. Kurz, J. Niehusmann, P. Haring Bolivar
Research output: Contribution to journal › Conference article › peer-review
36
Citations
(Scopus)