Growth and characterization of silicon oxide films formed in the presence of Si, SiC, and Si3N4

Yaqiong Li, Lucas Nana Wiredu Damoah, Lifeng Zhang

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Growth and characterization of silicon oxide films formed in the presence of Si, SiC, and Si3N4'. Together they form a unique fingerprint.

Material Science

Engineering

Chemical Engineering