Abstract
We have investigated the effect of ZnO films used as buffer layers on the triboluminescence (TrL) intensity of ZnS:Mn thin films on quartz substrates using RF magnetron sputtering method and annealing technique. Highly oriented film of ZnO was firstly deposited on quartz glass substrate and then the ZnS:Mn film was successfully deposited on the ZnO film with orientation. By annealing at 5% H2 in Ar ambient, the crystallinity of both ZnO and ZnS:Mn films was increased. It was found that the addition of the ZnO buffer layer greatly improve the TrL intensity of the ZnS:Mn films.
| Original language | English |
|---|---|
| Pages (from-to) | 181-187 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4576 |
| DOIs | |
| Publication status | Published - 2001 |
| Externally published | Yes |
| Event | Advanced Environmental Sensing Technology II - Newton, MA Duration: 31 Oct 2001 → 1 Nov 2001 |
Keywords
- Buffer layers
- Crystallinity
- Defects
- Triboluminescence
- ZnS thin films