Abstract
We have investigated the effect of ZnO films used as buffer layers on the triboluminescence (TrL) intensity of ZnS:Mn thin films on quartz substrates using RF magnetron sputtering method and annealing technique. Highly oriented film of ZnO was firstly deposited on quartz glass substrate and then the ZnS:Mn film was successfully deposited on the ZnO film with orientation. By annealing at 5% H2 in Ar ambient, the crystallinity of both ZnO and ZnS:Mn films was increased. It was found that the addition of the ZnO buffer layer greatly improve the TrL intensity of the ZnS:Mn films.
Original language | English |
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Pages (from-to) | 181-187 |
Number of pages | 7 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4576 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |
Event | Advanced Environmental Sensing Technology II - Newton, MA Duration: 31 Oct 2001 → 1 Nov 2001 |
Keywords
- Buffer layers
- Crystallinity
- Defects
- Triboluminescence
- ZnS thin films