CMOS compatibility of crystalline Gd2O2 high-K / metal gate stacks

H. D.B. Gottlob, T. Echtermeyer, T. Mollenhauer, J. Efavi, M. Schmidt, T. Wahlbrink, M. C. Lemme, H. Kurz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publication2005 International Semiconductor Device Research Symposium
Pages276-277
Number of pages2
Publication statusPublished - 2005
Externally publishedYes
Event2005 International Semiconductor Device Research Symposium - Bethesda, MD
Duration: 7 Dec 20059 Dec 2005

Publication series

Name2005 International Semiconductor Device Research Symposium
Volume2005

Conference

Conference2005 International Semiconductor Device Research Symposium
Country/TerritoryUnited States
CityBethesda, MD
Period7/12/059/12/05

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