@inproceedings{9670ab6a6c4f42b48319101aab50b15f,
title = "CMOS compatibility of crystalline Gd2O2 high-K / metal gate stacks",
author = "Gottlob, {H. D.B.} and T. Echtermeyer and T. Mollenhauer and J. Efavi and M. Schmidt and T. Wahlbrink and Lemme, {M. C.} and H. Kurz",
year = "2005",
language = "English",
isbn = "1424400848",
series = "2005 International Semiconductor Device Research Symposium",
pages = "276--277",
booktitle = "2005 International Semiconductor Device Research Symposium",
note = "2005 International Semiconductor Device Research Symposium ; Conference date: 07-12-2005 Through 09-12-2005",
}