Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectrics
- H. D.B. Gottlob
- , T. Echtermeyer
- , T. Mollenhauer
- , M. Schmidt
- , J. K. Efavi
- , T. Wahlbrink
- , M. C. Lemme
- , H. Kurz
- , R. Endres
- , Y. Stefanov
- , U. Schwalke
- , M. Czernohorsky
- , E. Bugiel
- , A. Fissel
- , H. J. Osten
- AMO GmbH
- Darmstadt University of Technology
- Leibniz University of Hannover
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
2
Citations
(Scopus)