Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectrics

  • H. D.B. Gottlob
  • , T. Echtermeyer
  • , T. Mollenhauer
  • , M. Schmidt
  • , J. K. Efavi
  • , T. Wahlbrink
  • , M. C. Lemme
  • , H. Kurz
  • , R. Endres
  • , Y. Stefanov
  • , U. Schwalke
  • , M. Czernohorsky
  • , E. Bugiel
  • , A. Fissel
  • , H. J. Osten

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

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